1/25/2013	11:50:11 AM	Helium valve closed
1/25/2013	11:50:11 AM	H2 valve closed
1/25/2013	11:50:11 AM	BCl3 valve closed
1/25/2013	11:50:11 AM	PH3 valve closed
1/25/2013	11:50:11 AM	SiCl4 pre valve closed
1/25/2013	11:50:11 AM	SiCl4 post valve closed
1/25/2013	11:50:11 AM	Main Vac valve closed
1/25/2013	11:50:11 AM	Bypass valve closed
1/25/2013	11:50:11 AM	Bubbler valve closed
1/25/2013	11:50:11 AM	Helium MFC set to  0.000000
1/25/2013	11:50:11 AM	H2 MFC set to  0.000000
1/25/2013	11:50:11 AM	BCl3 MFC set to  0.000000
1/25/2013	11:50:11 AM	PH3 MFC set to  0.000000
1/25/2013	11:50:11 AM	SiCl4 MFC set to  0.000000
1/25/2013	11:50:11 AM	Bypass solenoid MFC set to  760.000000
1/25/2013	11:50:11 AM	Tube furnace set to 0
1/25/2013	11:50:24 AM	Main Vac valve opened
1/25/2013	4:23:29 PM	Program exited cleanly
1/25/2013	4:23:47 PM	Helium valve closed
1/25/2013	4:23:47 PM	H2 valve closed
1/25/2013	4:23:47 PM	BCl3 valve closed
1/25/2013	4:23:47 PM	PH3 valve closed
1/25/2013	4:23:47 PM	SiCl4 pre valve closed
1/25/2013	4:23:47 PM	SiCl4 post valve closed
1/25/2013	4:23:47 PM	Main Vac valve closed
1/25/2013	4:23:47 PM	Bypass valve closed
1/25/2013	4:23:47 PM	Bubbler valve closed
1/25/2013	4:23:47 PM	Helium MFC set to  0.000000
1/25/2013	4:23:47 PM	H2 MFC set to  0.000000
1/25/2013	4:23:47 PM	BCl3 MFC set to  0.000000
1/25/2013	4:23:47 PM	PH3 MFC set to  0.000000
1/25/2013	4:23:47 PM	SiCl4 MFC set to  0.000000
1/25/2013	4:23:47 PM	Bypass solenoid MFC set to  760.000000
1/25/2013	4:23:47 PM	Tube furnace set to 0
1/25/2013	4:23:48 PM	Main Vac valve opened
